| Record Type: |
Language materials, printed
: monographic
|
| Paralel Title: |
Semiconductor processing equipment |
| Author: |
張勁燕, |
| Place of Publication: |
臺北市 |
| Published: |
五南; |
| Year of Publication: |
2009 |
| Edition: |
四版 |
| Description: |
[11],586面 : 圖,表格 ; 26公分; |
| Subject: |
半導體 - |
| [NT 15000223]: |
含參考書目及索引 |
| ISBN: |
978-957-11-5250-9 平裝 新台幣720元 |
| [NT 15000415]: |
448.65 |